Fringe stabilization and depth monitoring during the holographic photoelectrochemical etching of n-InP (100) substrates
نویسندگان
چکیده
منابع مشابه
Photoelectrochemical Etching of InAs
Photoelectrochemieal etching of n-InAs (Eg = 0.36 eV) is demonstrated. Although the concentration of thermally generated minority carriers and saturation current are high compared to larger bandgap semiconductors, photocurrent to dark current ratios as high as 4:1 were obtained at low temperature (2°C) and at potentials near the flatband potential. A surface film primarily composed of arsenic o...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1996
ISSN: 0734-211X
DOI: 10.1116/1.588557